Comprehensive Structural and Vibrational Insights into Electron Beam Deposited Copper Thin Films

Abstract

A cost-effective Electron beam evaporation technique with post-oxidation was used to deposit copper oxide thin films. Structural analysis was done by Reitveld refinement using Fullprof software. Reitveld refinement showed that prepared films had monoclinic structure with space group C2/c. From Reitveld analysis lattice parameters and Interplanar spacing was calculated for all the prepared samples. Raman spectroscopy confirmed the successful transformation of metallic copper to copper oxide phase. XPS analysis confirmed the presence of Cu²⁺ oxidation states demonstrating the successful formation of CuO. The combined structural and chemical analysis demonstrates that the prepared films possess improved phase purity making them suitable for applications in optoelectronics, sensing, and nonlinear optical devices.