Innovative Design of a 5.3 GHz SAW Resonator for Next-Generation Electronic Systems

Abstract

The swift expansion of fifth generation (5G) wireless technology demands high-performance radio frequency filters capable of operating at broader and higher frequency bands. 5G systems utilize frequencies from 3.0 to 6.0 GHz and millimetre waves. In this work, a multilayer single-port surface acoustic wave (SAW) device is presented based on a 128° YX-cut lithium niobate (LiNbO₃) piezoelectric material. The structure consists of a 500 nm-thick 128° YX-cut LiNbO₃ single-crystal substrate (500 nm LiNbO₃ film deposited on a 500 nm silicon layer and a 300 nm aluminium layer using spin coating). The proposed LiNbO₃/Al/Si multilayer SAW resonator operates at a resonance frequency of 5.3 GHz, achieving a quality factor of 250, a bandwidth of 20.8 MHz, and an electromechanical coupling coefficient of 3%. The device demonstrates an improved trade-off between bandwidth and resonator efficiency, making it a promising candidate for nextgeneration wireless communication systems. The results confirm that SAW devices using the 128° YX LiNbO₃/Al/Si multilayer structure offer excellent performance, making them suitable for 5G wireless communication systems.