“Ion-Beam-Induced Modifications of Nanocrystalline ZnO Thin Films Grown by Atomic Layer Deposition: ION-BEAM-INDUCED MODIFICATIONS OF NANOCRYSTALLINE ”, IJEMS, vol. 30, no. 3, pp. 437–446, Oct. 2023, doi: 10.56042/ijems.v30i3.3792.