Ion-Beam-Induced Modifications of Nanocrystalline ZnO Thin Films Grown by Atomic Layer Deposition: ION-BEAM-INDUCED MODIFICATIONS OF NANOCRYSTALLINE . Indian Journal of Engineering and Materials Sciences (IJEMS), [S. l.], v. 30, n. 3, p. 437–446, 2023. DOI: 10.56042/ijems.v30i3.3792. Disponível em: https://or.niscpr.res.in/index.php/IJEMS/article/view/3792. Acesso em: 13 may. 2026.