Design and Optimization of MEMS based AlN Sensor for Acoustic Application: AlN SENSOR FOR ACOUSTIC APPLICATION . Indian Journal of Engineering and Materials Sciences (IJEMS), [S. l.], v. 30, n. 3, p. 369–375, 2023. DOI: 10.56042/ijems.v30i3.3658. Disponível em: https://or.niscpr.res.in/index.php/IJEMS/article/view/3658. Acesso em: 13 may. 2026.